Effect of nitrogen doping on field emission characteristics of patterned diamond-like carbon films prepared by pulsed laser deposition
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Published:2000
Issue:2
Volume:18
Page:1027
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:en
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Short-container-title:J. Vac. Sci. Technol. B
Author:
Shin I. H.,Lee T. D.
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
12 articles.
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