Characterization of the high harmonics source for the VUV ellipsometer at ELI Beamlines-Reference-Cited by-同舟云学术

Characterization of the high harmonics source for the VUV ellipsometer at ELI Beamlines

Published:2020-03 Issue:2 Volume:38 Page:024005
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Espinoza Shirly¹^ORCID,Samparisi Fabio²,Frassetto Fabio²^ORCID,Richter Steffen¹,Rebarz Mateusz¹^ORCID,Finke Ondrej¹³,Albrecht Martin¹³^ORCID,Jurkovic Matej¹³^ORCID,Hort Ondrej¹^ORCID,Fabris Nicola²^ORCID,Zymaková Anna¹^ORCID,Mai Dong Du¹^ORCID,Antipenkov Roman¹^ORCID,Nejdl Jaroslav¹^ORCID,Poletto Luca²^ORCID,Andreasson Jakob¹^ORCID

Affiliation:

1. Institute of Physics, Czech Academy of Science, Na Slovance 2, 18221 Prague, Czech Republic

2. Institute of Photonics and Nanotechnologies, National Council for Research, Via Trasea 7, 35131 Padova, Italy

3. Faculty of Nuclear Sciences and Physical Engineering, Czech Technical University, Brehova 7, 115 19 Prague, Czech Republic

Funder

European Regional Development Fund

Ministerstvo Školství, Mládeže a Tělovýchovy

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5129674

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