Optical, electrical, and structural properties of single-phase Ti2 − xN films deposited by cathodic cage
-
Published:2019-11-01
Issue:
Volume:
Page:
-
ISSN:2166-2746
-
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
-
language:
-
Short-container-title:
您需要登录后可以查看相关数据！