Impact of Cr2O3 additives on the gas-sensitive properties of β-Ga2O3 thin films to oxygen, hydrogen, carbon monoxide, and toluene vapors-Reference-Cited by-同舟云学术

Impact of Cr2O3 additives on the gas-sensitive properties of β-Ga2O3 thin films to oxygen, hydrogen, carbon monoxide, and toluene vapors

Published:2021-03 Issue:2 Volume:39 Page:023405
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Almaev Aleksei V.¹^ORCID,Chernikov Evgeny V.¹,Novikov Vadim V.¹^ORCID,Kushnarev Bogdan O.¹,Yakovlev Nikita N.¹,Chuprakova Ekaterina V.¹,Oleinik Vladimir L.¹^ORCID,Lozinskaya Anastasiya D.¹,Gogova Daniela S.²³^ORCID

Affiliation:

1. Research and Development Center for Advanced Technologies in Microelectronics, National Research Tomsk State University, 36 Lenin Avenue, Tomsk 634050, Russia

2. Lobachevsky State University of Nizhny Novgorod, 23 Gagarin Avenue, Nizhny Novgorod 603950, Russia

3. Department of Physics, Center for Materials Science and Nanotechnology, University of Oslo, PO Box 1048, Blindern, NO-0316 Oslo, Norway

Funder

Russian Science Foundation

Russian Foundation for Basic Research

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/6.0000723

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