Analysis of 2D Simulation of Hydrogenated Silicon Nitride Plasma Discharge in CCP Reactor for Thin Film Solar Cell Deposition
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Publisher
Springer Nature Singapore
Link
https://link.springer.com/content/pdf/10.1007/978-981-19-6223-3_20
Reference19 articles.
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4. Grari M, Zoheir C (2020) Numerical modeling of non-equilibrium plasma discharge of hydrogenated silicon nitride (SiH4/NH3/H2). Int J Eng 33(8):1449
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