PDMS on ZnO Thin Film: A Mask for ZnO Thin Film in MEMS Fabrication
Author:
Publisher
Springer Singapore
Link
http://link.springer.com/content/pdf/10.1007/978-981-15-9904-0_9
Reference51 articles.
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3. Baraki R, Novak N, Fromling T, Granzow T, Rodel J (2014) Bulk ZnO as piezotronic pressure sensor. App Phys Lett 105:111604
4. DeVoe DL, Pisano AP (2001) Surface micromachined piezoelectric accelerometers (PiXLs). J Microelectromech Syst 10:180
5. Percin G, Yakub BTK (2002) Piezoelectrically actuated flextensional micromachined ultrasound transducers. Ultrasonics 40:441
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