Theoretical simulation of backscattered electron images of Si/SixGe1-x structures with a scanning electron microscope-Reference-Cited by-同舟云学术

Theoretical simulation of backscattered electron images of Si/SixGe1-x structures with a scanning electron microscope

Published:1994-12 Issue:1 Volume:114-115 Page:261-266
ISSN:0026-3672
Container-title:Microchimica Acta
language:en
Short-container-title:Mikrochim Acta

Author:

De Riccardis Angela C.,Merli Pier Giorgio,Nacucchi Michele,Tapfer Leander

Publisher

Springer Science and Business Media LLC

Subject

Analytical Chemistry

Link

http://link.springer.com/content/pdf/10.1007/BF01244551.pdf

Reference8 articles.

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2. S. Franchi, P. G. Merli, A. Migliori, K. Ogura, A. Ono,Electron Microsc. 1990, 380.

3. [3]P. G. Merli, M. Nacucchi,Ultramicroscopy 1993,50, 83.

4. M. Nacucchi, P. G. Merli, A. Bosacchi, in:Proc. of the 10th European Congress on Electron Microscopy, Vol. 2 (A. Rios, J. M. Arias, L. Meg�as-Meg�as, A. L�pez-Galindo, eds.), Granada, Spain, 7?11 Sept. 1992, p. 149.

5. G. C. Archard,J. Appl. Phys. 1961,32, 1505.

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