1. Maluf N., Williams K.: An Introduction to Microelectromechanical Systems Engineering, 2nd edn. Microelectromechanical Systems (MEMS) Series. Artech House Inc., Boston (1999)
2. Younis, M.I.: Modeling and simulation of microelectromechanical systems in multi-physics fields. Dissertation submitted to the Faculty of the Virginia Polytechnic Institute and State University in partial fulfillment of the requirements for the degree of Doctor of Philosophy in Engineering Mechanics
3. Chao P.C.P, Chiu C.W., Tsai C.Y.: A novel method to predict the pull-in voltage in a closed form for micro-plates actuated by a distributed electrostatic force. J. Micromech. Microeng. 16, 986–998 (2006)
4. Hornbeck, L.J.: Spatial light modulator and method. US Patent 5,061,049 (1991)
5. Ford J.E., Aksyuk V.A., Bishop D.J., Walker J.A.: Wavelength add-drop swiching using tilting micromirrors. J. Lightwave technol. 17, 904–911 (1999)