High-k titanium–aluminum oxide dielectric films prepared by inorganic–organic hybrid solution
Author:
Publisher
Springer Science and Business Media LLC
Link
http://link.springer.com/content/pdf/10.1007/s10971-014-3400-y.pdf
Reference30 articles.
1. Shi L, Xia YD, Xu B, Yin J, Liu ZG (2007) Thermal stability and electrical properties of titanium–aluminum oxide ultrathin films as high-k gate dielectric materials. J Appl Phys 101:034102
2. Meyers ST, Anderson JT, Hong D, Hung CM, Wager JF, Keszler DA (2007) Solution-processed aluminum oxide phosphate thin-film dielectrics. Chem Mater 19:4023–4029
3. Song K, Yang W, Jung Y, Jeong S, Moon J (2012) A solution-processed yttrium oxide gate insulator for high-performance all-solution-processed fully transparent thin film transistors. J Mater Chem 22:21265–21271
4. Choi S, Park BY, Jang M, Jeong S, Lee JY, Ryu BH, Seong TY, Jung HK (2011) Solution processed high-k lanthanide oxides for low voltage driven transparent oxide semiconductor thin film transistors. ECS Trans 35(4):901–908
5. Li XF, Xin EL, Zhang JH (2013) Low-temperature solution-processed zirconium oxide gate insulators for thin-film transistors. IEEE T Electron Dev 60(10):3413–3416
Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Effect of Annealing Temperature on the Structural, Optical, and Electrical Properties of Al-Doped ZrO2 Gate Dielectric Films Treated by the Sol–Gel Method;Coatings;2022-11-27
2. Synthesis and characterization of mist chemical vapor deposited aluminum titanium oxide films;Japanese Journal of Applied Physics;2019-06-28
3. Synthesis, dielectric properties and application in a thin film transistor device of amorphous aluminum oxide AlxOy using a molecular based precursor route;Journal of Materials Chemistry C;2019
4. Solution-processed stacked TiO2 and Al2O3 dielectric layers for high mobility thin film transistor;AIP Advances;2018-08-01
5. Titania–silica hybrid films derived by a sol–gel process for organic field effect transistors;Journal of Sol-Gel Science and Technology;2017-07-06
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.7亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2025 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3