Author:
Varma M. Aditya,Jindal Sumit Kumar
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Modeling and Simulation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference23 articles.
1. Hsu, T.R.: MEMS and Microsystems Design and Manufacture. Tata Mc-Graw Hill, New Delhi (2002)
2. Beeby, S., Kraft, M.: Mechanical sensors. Artech House (2004)
3. Eaton, W.P., Smith, J.H.: Micromachined pressure sensors: review and recent developments. Smart Mater. Struct. 6(5), 530–539 (1997)
4. Bao, M.: Analysis and Design Principles of MEMS Devices. Elsevier, Amsterdam (2005)
5. Jindal, S.K., Raghuwanshi, S.K.: A complete analytical model for circular diaphragm pressure sensor for freely supported edge. Microsyst. Technol. 21(5), 1073–1079 (2014)
Cited by
14 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献