Polishing technology of surface for diamond film using the method of laser ablation

Author:

Changzhi Gu,Zengsun Jin,Yuguang Wang,Rongshu Zhuang,Xianyi Lü,Shutang Zhao,Guangtian Zou

Publisher

Springer Science and Business Media LLC

Subject

Multidisciplinary

Reference5 articles.

1. Jansen, F., Machonkin, M. AK., Kuhman, D. E., Diamond films synthesized by CVD methods,J. Vac. Sci. Technol., A, 1990, 8: 3–785.

2. Yangqiu, Y., Experiment for test method of thermal property of thin type materials,Engineer Thermal Physics (in Chinese), 1992, 13: 76.

3. Tosin, P., Blatter, A., Luthy, W., Laser-induced surface structures on diamond films,J. Appl. Phys., 1995, 78: 3797.

4. Tzeng, Y., Wei, J., Cutshaw, C.et al., Rapid polishing of thick polycrystalline white CVD diamond by liquid metal films.Proc. of the 3rd Inter. Conf. on the Appl. of Diamond Film and Related Materials, Gaithersburg (U. S. A.). 1995, 241–248.

5. Malshe, A. P., Glezen, J. H., Naeem, H. A.et al., Advances in diamond based multichip moduces,Proc. of Inter. Conf. on MCM, New York (U.S.A.), 1995, 140–144.

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