Fourier Transform Thermoreflectance Method Under Front-Heat Front-Detect Configuration

Abstract

AbstractThe thermoreflectance method, which can measure thermal diffusivity in the cross-plane direction of thin films, mainly has two possible configurations; rear-heat front-detect (RF) and front-heat front-detect (FF) configuration. FF configuration is applicable to a wide variety of thin films including thin films deposited on opaque substrates, but this configuration has some problems in determination of the thermal diffusivity. One of the main problems is the effect of the penetration of pump beam and probe beam in thin film, which affects the initial temperature distribution near the sample’s surface after pulse heating. Several studies have tried to analyze the effect but there have been no practical analytical solutions which can solve this problem in FF configuration. In this paper, we propose a new analytical solution which considers the penetration of pump beam and probe beam into thin film, and by applying Fourier expansion analysis which we developed in a previous study to thermoreflectance signals, we have determined the thermal diffusivity of thin film in the thermoreflectance method under FF configuration. We measured platinum thin films with different thickness under both FF and RF configuration and obtained consistent thermal diffusivity values from both configurations.