Stability and Resolution of a Conventional Displacement Measuring Heterodyne Interferometer Using a Single Phase-Locked Loop
Author:
Funder
Vietnam Ministry of Education and Training
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,Aerospace Engineering
Link
https://link.springer.com/content/pdf/10.1007/s11340-023-00970-x.pdf
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4. Gao W, Haitjema H, Fang FZ, Leach RK, Cheung CF, Savio E, Linares JM (2019) On-machine and in-process surface metrology for precision manufacturing. CIRP Ann 68:843–866
5. Yoon J-S, Baek R-H (2020) Device Design Guideline of 5-nm-Node FinFETs and Nanosheet FETs for Analog/RF Applications. IEEE Access 8:89395–189403
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