Author:
Saravanan Prabakaran,Satyanarayana Nalam,Sinha Sujeet K.
Publisher
Springer Science and Business Media LLC
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanical Engineering,Mechanics of Materials
Reference34 articles.
1. Marinis, T.F.: The future of microelectromechanical systems (MEMS). Strain 45, 208–220 (2009)
2. Kim, S.H., Asay, D.B., Dugger, M.T.: Nanotribology and MEMS. NanoToday 2, 22–29 (2007)
3. de Boer, M.P., Mayer, T.M.: Tribology of MEMS. MRS Bull. 4, 302–304 (2001)
4. Lee, K.K., Bhushan, B., Hansford, D.: Nanotribological characterization of fluoropolymer thin films for biomedical micro/nanoelectromechanical system applications. J. Vac. Sci. Technol. A 23, 804–810 (2005)
5. Gelorme, J.D., Cox, R.J., Gutierrez, S.A.R.: Photoresist composition and printed circuit boards and packages made herewith. US Patent 4,882,245, 21 Nov 1989
Cited by
43 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献