Roles of overlapped scratching in grating fabrications assisted by selective wet etching
Author:
Funder
National Natural Science Foundation of China
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Link
https://link.springer.com/content/pdf/10.1007/s10853-023-09010-4.pdf
Reference46 articles.
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2. Jirigalantu XTL, Zhang SW et al (2016) Ruling of echelles and gratings with a diamond tool by the torque equilibrium method. Appl Opt 55:8082–8088. https://doi.org/10.1364/Ao.55.008082
3. Zhang BQ, Wang QH, Shen NG, Ding HT (2017) Experimental investigation and numerical analysis of mechanical ruling for an aluminum-coated diffraction grating. J Manuf Sci Eng-Trans Asme 139:021003. https://doi.org/10.1115/1.4034282
4. Liu Q, Wu JH, Chen MH (2013) Fabrication of blazed grating by native substrate grating mask. Opt Eng 52:091706. https://doi.org/10.1117/1.Oe.52.9.091706
5. Johnson CW, Bauer DH, McMorran BJ (2020) Improved control of electron computer-generated holographic grating groove profiles using ion beam gas-assisted etching. Appl Opt 59:1594–1601. https://doi.org/10.1364/AO.376876
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