Towards nanometric resolution in multilayer depth profiling: a comparative study of RBS, SIMS, XPS and GDOES
Author:
Publisher
Springer Science and Business Media LLC
Subject
Biochemistry,Analytical Chemistry
Link
http://link.springer.com/content/pdf/10.1007/s00216-009-3339-y.pdf
Reference100 articles.
1. Werner HW, Garten RPH (1984) A comparative study of methods for thin-film and surface analysis. Rep Prog Phys 47:221–344
2. Alford TL, Feldman LC, Mayer JW (eds) (2007) Fundamentals of nanoscale film analysis. Springer, New York
3. Hofmann S (1990) In: Briggs D, Seah MP (eds) Practical surface analysis by Auger and X-ray photoelectron spectroscopy. Wiley, Chichester
4. Oswald S, Baunack S (2003) Comparison of depth profiling techniques using ion sputtering from the practical point of view. Thin Solid Films 425:9–19
5. Hofmann S (1991) Compositional depth profiling by sputtering. Prog Surf Sci 36(1):35–87
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