Author:
Comi Claudia,Corigliano Alberto,Ghisi Aldo,Zerbini Sarah
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics
Reference15 articles.
1. Senturia SD (2002) Microsystem design. Kluwer Academy, Dordrecht
2. Gardner JW, Varadan VK, Awadelkarim OO (2001) Microsensors MEMS and smart devices. Wiley, Chichester
3. Beliveau A, Spencer GT, Thomas KA, Roberson SL (1999) Evaluation of MEMS capacitive accelerometers. IEEE Design Test Comput 16(4):48–56
4. Bruns DW, Horning RD, Herb WR, Zook JD, Guckel H (1995) Resonant microbeam accelerometers. In: Proc transducers, Stockholm, Sweden, June 25–29 1995, vol 95, pp 659–662
5. Aikele M, Bauer K, Ficker W, Neubauer F, Prechtel U, Schalk J, Seidel H (2001) Resonant accelerometer with self-test. Sens Actuators A, Phys 92:161–167
Cited by
31 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献