1. R. Ghodsi, P. Lin (eds.), MEMS Materials and Process Handbook (Springer, New York, 2011)
2. E.P. Popov, Introduction to the Mechanics of Solids (Prentice-Hall, Englewood Cliffs, 1968)
3. M. Ohring, The Materials Science of Thin Films (Academic Press, London, 1992)
4. M. Huff, A thermally isolated microstructure suitable for gas sensing applications, S.M. Thesis, MIT, 1988
5. S. Senturia, Can we design microrobotic devices without knowing the mechanical properties of the materials? Micro robots and teleoperators workshop, Hyannis, 1987