Micromachined infrared pneumatic detector for gas sensor

Author:

Chévrier J. -B.,Baert K.,Slater T.,Verbist A.

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference9 articles.

1. Chatanier, M.; Gauffre, G. (1973) Infrared transducer for space uses. IEEE Trans. on Inst. and Meas. June 1973: 179–181

2. Chévrier, J-B.; Baert, K.; Slater, T. (1994) An infrared pneumatic detector made by micromachining technology. Accepted for presentation at MME'94, 6–8 Sept. 94, Pisa Italy

3. Clark, S.K.;Wise, K.D. (1979) Pressure sensitivity in anisotropically etched thin diaphragm pressure sensors. IEEE Trans. on Elec. Dev. 26: 1887–1896

4. Gabrielson, T.B. (1993) Mechanical-thermal noise in micromachined acoustic and vibration sensors. IEEE Trans. on Elect. Devices 40: 903–909

5. Golay, M.J.E. (1947) Theoretical consideration in heat and infra-red detection, with particular reference to the pneumatic detector. Rev. Sci. Instrum. 18: 347–356

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